Micro-electromechanical fluid ejection device having a nozzle guard

ABSTRACT

A micro-electromechanical fluid ejection device includes a substrate that defines a fluid inlet channel and incorporates a wafer and CMOS layers positioned on the wafer. A nozzle chamber structure is positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet channel and a fluid ejection port in fluid communication with the nozzle chamber. An actuator is connected to the CMOS layers and is operatively positioned with respect to the nozzle chamber. The actuator is displaceable on receipt of an electrical signal from the CMOS layers to act on fluid in the nozzle chamber to eject fluid from the fluid ejection port. A nozzle guard is mounted on the substrate to be spaced from and cover the nozzle chamber structure. The nozzle guard includes a body member that defines a passage that is aligned with the fluid ejection port so that fluid ejected from the fluid ejection port passes through the passage.

Continuation application of U.S. Ser. No. 10/309,080 filed on Dec. 4,2002 now U.S. Pat. No. 6,682,176.

FIELD OF THE INVENTION

The present invention relates to micro-electromechanical fluid ejectiondevices.

BACKGROUND OF THE INVENTION

Many different types of printing have been invented, a large number ofwhich are presently in use. The known forms of printers have a varietyof methods for marking the print media with relevant marking media.Commonly used forms of printing include offset printing, laser printingand copying devices, dot matrix type impact printers, thermal paperprinters, film recorders, thermal wax printers, dye sublimation printersand ink jet printers both of the drop on demand and continuous flowtype. Each type of printer has its own advantages and problems whenconsidering cost, speed, quality, reliability, simplicity ofconstruction and operation etc.

In recent years, the field of ink jet printing, wherein each individualpixel of ink is derived from one or more ink nozzles has becomeincreasingly popular primarily due to its inexpensive and versatilenature.

Many different techniques on ink jet printing have been invented. For asurvey of the field, reference is made to an article by J Moore,“Non-Impact Printing: Introduction and Historical Perspective”, OutputHard Copy Devices, Editors R Dubeck and S Sherr, pages 207-220 (1988).

Ink Jet printers themselves come in many different types. Theutilisation of a continuous stream of ink in ink jet printing appears todate back to at least 1929 wherein U.S. Pat. No. 1,941,001 by Hanselldiscloses a simple form of continuous stream electro-static ink jetprinting.

U.S. Pat. No. 3,596,275 by Sweet also discloses a process of continuousink jet printing including the step wherein the ink jet stream ismodulated by a high frequency electrostatic field so as to cause dropseparation. This technique is still utilized by several manufacturersincluding Elmjet and Scitex (see also U.S. Pat. No. 3,373,437 by Sweetet al)

Piezoelectric ink jet printers are also one form of commonly utilizedink jet printing device. Piezoelectric systems are disclosed by Kyseret. al. in U.S. Pat. No. 3,946,398 (1970) which utilizes a diaphragmmode of operation, by Zolten in U.S. Pat. No. 3,683,212 (1970) whichdiscloses a squeeze mode of operation of a piezoelectric crystal, byStemme in U.S. Pat. No. 3,747,120 (1972) which discloses a bend mode ofpiezoelectric operation, Howkins in U.S. Pat. No. 4,459,601 whichdiscloses a piezoelectric push mode actuation of the ink jet stream andby Fischbeck in U.S. Pat. No. 4,584,590 which discloses a shear modetype of piezoelectric transducer element.

Recently, thermal ink jet printing has become an extremely popular formof ink jet printing. The ink jet printing techniques include thosedisclosed by Endo et al in GB 2007162 (1979) and by Vaught et al in U.S.Pat. No. 4,490,728. Both the aforementioned reference ink jet printingtechniques rely upon the activation of an electrothermal actuator whichresults in the creation of a bubble in a constricted space, such as anozzle, which thereby causes the ejection of ink from an aperture incommunication with the confined space onto a relevant print media.Manufacturers such as Canon and Hewlett Packard manufacture printingdevices utilizing the electrothermal actuator.

As can be seen from the foregoing, many different types of printingtechnologies are available. Ideally, a printing technology should have anumber of desirable attributes. These include inexpensive constructionand operation, high-speed operation, safe and continuous long-termoperation etc. Each technology may have its own advantages anddisadvantages in the areas of cost, speed, quality, reliability, powerusage, simplicity of construction, operation, durability andconsumables.

In the construction of any inkjet printing system, there are aconsiderable number of important factors which must be traded offagainst one another especially as large scale printheads areconstructed, especially those of a pagewidth type. A number of thesefactors are outlined in the following paragraphs.

Firstly, inkjet printheads are normally constructed utilizingmicro-electromechanical systems (MEMS) techniques. As such, they tend torely upon the standard integrated circuit construction/fabricationtechniques of depositing planar layers on a silicon wafer and etchingcertain portions of the planar layers. Within silicon circuitfabrication technology, certain techniques are better known than others.For example, the techniques associated with the creation of CMOScircuits are likely to be more readily used than those associated withthe creation of exotic circuits including ferroelectrics, galliumarsenide etc. Hence, it is desirable, in any MEMS construction, toutilize well-proven semi-conductor fabrication techniques that do notrequire the utilization of any “exotic” processes or materials. Ofcourse, a certain degree of trade off will be undertaken in that if theuse of the exotic material far outweighs its disadvantages then it maybecome desirable to utilize the material anyway.

With a large array of ink ejection nozzles, it is desirable to providefor a highly automated form of manufacturing which results in aninexpensive production of multiple printhead devices.

Preferably, the device constructed utilizes a low amount of energy inthe ejection of ink. The utilization of a low amount of energy isparticularly important when a large pagewidth full color printhead isconstructed having a large array of individual print ejection mechanismswith each ejection mechanism, in the worst case, being fired in a rapidsequence.

In the parent application, namely U.S. application Ser. No. 09/113,122there is disclosed a printhead chip having a plurality of nozzlearrangements. These nozzle arrangements each include an actuator. Theactuator has two pairs of actuating arms, each pair comprising an activeactuating arm and a passive actuating arm. The active actuating arms areconfigured so that when heated upon receipt of an electrical signal,they deform and drive an ink displacement mechanism so that ink can beejected from the respective nozzle chambers. The passive actuating armsserve to provide resilient flexibility and stability to the actuator.

The Applicant has found that it is desirable that the actuator has acertain configuration to avoid buckling of the actuator when the activeactuating arms are deformed to displace the actuator. While avoidingbuckling, this configuration must also maintain efficiency of theactuator. This configuration is the subject of this invention.

SUMMARY OF THE INVENTION

According to a first aspect of the invention, there is provided amicro-electromechanical fluid ejection device that comprises

a substrate that defines a fluid inlet channel and incorporates a waferand CMOS layers positioned on the wafer;

a nozzle chamber structure that is positioned on the substrate to definea nozzle chamber in fluid communication with the fluid inlet channel anda fluid ejection port in fluid communication with the nozzle chamber;

an actuator that is connected to the CMOS layers and operativelypositioned with respect to the nozzle chamber, the actuator beingdisplaceable on receipt of an electrical signal from the CMOS layers toact on fluid in the nozzle chamber to eject fluid from the fluidejection port; and

a nozzle guard that is mounted on the substrate to be spaced from andcover the nozzle chamber structure, the nozzle guard including a bodymember that defines a passage that is aligned with the fluid ejectionport so that fluid ejected from the fluid ejection port passes throughthe passage.

The nozzle guard may include support members that are fast with thesubstrate to support the body member above the nozzle chamber structure.

The support members may define air inlet openings to permit air to bepumped into a region between the nozzle chamber structure and the bodymember and to exit through the passage.

The actuator may be elongate and may be connected at one end to the CMOSlayers. An opposite end of the actuator may be displaceable towards andaway from the substrate on receipt of an electrical signal from the CMOSlayers. The nozzle chamber structure may include a nozzle that isconnected to said opposite end of the actuator. The nozzle may have acrown portion and a skirt portion that depends from the crown portion,the crown portion defining the fluid ejection port and the skirt portionbeing positioned so that the nozzle and the wall define the nozzlechamber. A volume of the nozzle chamber may thus be reduced andsubsequently enlarged as the nozzle is driven towards and away from thenozzle chamber by the actuator to eject fluid from the fluid ejectionport.

An edge of the skirt portion may be positioned adjacent an edge of thewall such that, when the nozzle chamber is filled with liquid, ameniscus is pinned by the edges of the skirt portion and the wall todefine a fluidic seal that inhibits the egress of liquid from betweenthe wall and the skirt as liquid is ejected from the fluid ejectionport.

The crown portion may include a rim that defines the fluid ejectionport. The rim may provide an anchor point for a meniscus that is formedin the fluid ejection port when the chamber is filled with liquid.

According to a second aspect of the invention, there is provided amicro-electromechanical fluid ejection device which comprises

a substrate that defines a plurality of fluid inlet channels andincorporates a wafer and CMOS layers positioned on the wafer;

nozzle chamber structures that are positioned on the substrate to definenozzle chambers in fluid communication with respective fluid inletchannels and fluid ejection ports in fluid communication with respectivenozzle chambers;

actuators that are connected to the CMOS layers and operativelypositioned with respect to respective nozzle chambers, the actuatorsbeing displaceable on receipt of an electrical signal from the CMOSlayers to act on fluid in the respective nozzle chambers to eject fluidfrom the fluid ejection ports; and

a nozzle guard that is mounted on the substrate to be spaced from andcover the nozzle chamber structures, the nozzle guard including a bodymember that defines passages that are aligned with respective fluidejection ports so that fluid ejected from the fluid ejection portspasses through the passages.

In general, there is disclosed herein an ink jet nozzle assemblyincluding a nozzle chamber and a nozzle, the chamber including a movableportion and an actuating arm connected to or formed integrally with themovable portion and functioning in use to move said movable portionselectively to eject ink from the chamber via said nozzle, the actuatingarm having portions with equivalent thermal expansion characteristics soas to avoid differential thermal expansion in response to changes inambient temperature.

Preferably the actuating arm is formed of materials having equivalentthermal expansion characteristics and a current is passed through only aportion of the actuating arm to effect said movement.

Preferably said nozzle chamber has an inlet in fluid communication withan ink reservoir. The nozzle chamber may include a fixed portionconfigured with said movable portion such that relative movement in anejection phase reduces an effective volume of the chamber, and alternaterelative movement in a refill phase enlarges the effective volume of thechamber;

Portions of the actuating arms may be spaced apart and are adapted forselective differential thermal expansion upon heating so as to effectsaid relative movement.

The inlet may be positioned and dimensioned relative to the nozzle suchthat ink is ejected preferentially from the chamber through said nozzlein droplet form in the ejection phase, and ink is alternately drawnpreferentially into the chamber from the reservoir through the inlet inthe refill phase.

Preferably, said movable portion includes the nozzle and the fixedportion is mounted on a substrate.

Preferably the actuating arm effectively extends between the movableportion and the substrate.

Preferably the fixed portion includes the nozzle mounted on a substrateand the movable portion includes an ejection paddle.

Preferably the actuating arm is located substantially within thechamber.

Alternatively the actuating arm is located substantially outside thechamber.

Preferably the fixed portion includes a slotted sidewall in the chamberthrough which the actuating arm is connected to the movable portion.

Preferably the actuating arm has two portions that are of substantiallythe same cross-sectional profile relative to one another.

Alternatively the portions of the actuating arm are of differentcross-sectional profiles relative to one another.

Preferably the portions are of substantially the same materialcomposition relative to one another.

Alternatively the portions are of different material compositionrelative to one another.

Preferably the portions are substantially parallel to one another.

Alternatively the portions are substantially non-parallel to oneanother.

Preferably one portion is adapted to be heated to a higher temperaturesthan the other portion in order to effect thermal actuation.

Preferably the respective portions are formed from multiple layers ofdifferent material compositions disposed such that thermal expansion orcontraction in one portion due to the ambient temperature fluctuationsis balanced by a substantially corresponding thermal expansion orcontraction in the other portion.

Preferably the assembly is manufactured usingmicro-electro-mechanical-systems (MEMS) techniques.

Preferably an electric current is passed through one said portion armand not the other said portion in use.

According to a first aspect of the invention, there is provided an inkjet printhead chip that comprises

a substrate;

a plurality of nozzle arrangements positioned on the substrate, eachnozzle arrangement comprising

nozzle chamber walls that define a nozzle chamber and an ink ejectionport in fluid communication with the nozzle chamber;

an actuator that is connected to the substrate and is displaceable withrespect to the substrate upon receipt of a control signal, the actuatorbeing operatively arranged with respect to the nozzle chamber to ejectink from the ink ejection port on displacement of the actuator; wherein

the actuator includes an actuating arm that has at least one activeportion that is configured to be displaced upon receipt of the controlsignal and at least one corresponding passive portion, the, or each,active portion being spaced from its corresponding passive portion in aplane that spans the substrate, so that spacing between the, or each,active portion and its corresponding passive portion is greater than onepercent of a length of the actuating arm and less than twenty percent ofthe length of the actuating arm.

The actuator may include at least two pairs of corresponding active andpassive portions.

Each active portion may be in the form of an elongate active beam andeach passive portion may be in the form of an elongate passive beam.

The spacing between each active beam and its associated passive beam maybe greater than five percent of the length of the actuating arm and lessthan ten percent of the length of the actuating arm.

The actuator may include an ink ejecting mechanism that is operativelypositioned with respect to the nozzle chamber. An end of the actuatingarm may be anchored to the substrate and an opposed end of the actuatingarm may be connected to the ink ejecting mechanism so that displacementof the actuating arm results in the ink ejecting mechanism ejecting inkfrom the ink ejection port.

The invention extends to an inkjet printhead, which comprises at leastone ink jet printhead chip as described above.

BRIEF DESCRIPTION OF THE DRAWINGS

Notwithstanding any other forms, which may fall within the scope of thepresent invention, preferred forms of the invention will now bedescribed, by way of example only, with reference to the accompanyingdrawings in which:

FIGS. 1-3 illustrate the operational principles of the preferredembodiment;

FIG. 4 is a side perspective view of a single nozzle arrangement of thepreferred embodiment;

FIG. 5 illustrates a sectional side view of a single nozzle arrangement;

FIGS. 6 and 7 illustrate operational principles of the preferredembodiment;

FIGS. 8-15 illustrate the manufacturing steps in the construction of thepreferred embodiment;

FIG. 16 illustrates a top plan view of a single nozzle;

FIG. 17 illustrates a portion of a single color printhead device;

FIG. 18 illustrates a portion of a three-color printhead device;

FIG. 19 provides a legend of the materials indicated in FIGS. 20 to 29;

FIG. 20 to FIG. 29 illustrate sectional views of the manufacturing stepsin one form of construction of an ink jet printhead nozzle;

FIG. 30 shows a three dimensional, schematic view of a nozzle assemblyfor an ink jet printhead in accordance with another embodiment of theinvention;

FIGS. 31 to 33 show a three dimensional, schematic illustration of anoperation of the nozzle assembly of FIG. 30;

FIG. 34 shows a three dimensional view of a nozzle array constituting anink jet printhead;

FIG. 35 shows, on an enlarged scale, part of the array of FIG. 34;

FIG. 36 shows a three dimensional view of an ink jet printhead includinga nozzle guard;

FIGS. 37a to 37 r show three-dimensional views of steps in themanufacture of a nozzle assembly of an ink jet printhead;

FIGS. 38a to 38 r show sectional side views of the manufacturing steps;

FIGS. 39a to 39 k show layouts of masks used in various steps in themanufacturing process;

FIGS. 40a to 40 c show three dimensional views of an operation of thenozzle assembly manufactured according to the method of FIGS. 37 and 38;and

FIGS. 41a to 41 c show sectional side views of an operation of thenozzle assembly manufactured according to the method of FIGS. 37 and 38.

DESCRIPTION OF PREFERRED AND OTHER EMBODIMENTS

In the preferred embodiment, there is provided a nozzle chamber havingink within it and a thermal actuator device interconnected to an inkejecting mechanism in the form of a paddle, the thermal actuator devicebeing actuated so as to eject ink from the nozzle chamber. The preferredembodiment includes a particular thermal actuator structure whichincludes an actuator arm in the form of a tapered heater structure armfor providing positional heating of a conductive heater layer row. Theactuator arm is connected to the paddle through a slotted wall in thenozzle chamber. The actuator arm has a mating shape so as to matesubstantially with the surfaces of the slot in the nozzle chamber wall.

Turning initially to FIGS. 1-3, there is provided schematicillustrations of the basic operation of the device. A nozzle chamber 1is provided filled with ink 2 by means of an ink inlet channel 3 whichcan be etched through a wafer substrate on which the nozzle chamber 1rests. The nozzle chamber 1 includes an ink ejection nozzle or aperture4 around which an ink meniscus forms.

Inside the nozzle chamber 1 is a paddle type device 7 which is connectedto an actuator arm 8 through a slot in the wall of the nozzle chamber 1.The actuator arm 8 includes a heater means 9 located adjacent to a postend portion 10 of the actuator arm. The post 10 is fixed to a substrate.

When it is desired to eject a drop from the nozzle chamber, asillustrated in FIG. 2, the heater means 9 is heated so as to undergothermal expansion. Preferably, the heater means itself or the otherportions of the actuator arm 8 are built from materials having a highbend efficiency where the bend efficiency is defined as$\text{bend~~efficiency} = \frac{\text{Young's~~Modulus} \times \text{(Coefficient~~of~~thermal~~Expansion)}}{\text{Density} \times \text{Specific~~Heat~~Capacity}}$

A suitable material for the heater elements is a copper nickel alloywhich can be formed so as to bend a glass material.

The heater means is ideally located adjacent the post end portion 10such that the effects of activation are magnified at the paddle end 7such that small thermal expansions near post 10 result in largemovements of the paddle end. The heating 9 causes a general increase inpressure around the ink meniscus 5 which expands, as illustrated in FIG.2, in a rapid manner. The heater current is pulsed and ink is ejectedout of the nozzle 4 in addition to flowing in from the ink channel 3.Subsequently, the paddle 7 is deactivated to again return to itsquiescent position. The deactivation causes a general reflux of the inkinto the nozzle chamber. The forward momentum of the ink outside thenozzle rim and the corresponding backflow results in a general neckingand breaking off of a drop 12 which proceeds to the print media. Thecollapsed meniscus 5 results in a general sucking of ink into the nozzlechamber 1 via the in flow channel 3. In time, the nozzle chamber isrefilled such that the position in FIG. 1 is again reached and thenozzle chamber is subsequently ready for the ejection of another drop ofink.

Turning now to FIG. 4, there is illustrated a single nozzle arrangement20 of the preferred embodiment. The arrangement includes an actuator arm21 which includes a bottom layer 22 which is constructed from aconductive material such as a copper nickel alloy (hereinafter calledcupronickel) or titanium nitride (TiN). The layer 22, as will becomemore apparent hereinafter includes a tapered end portion near the endpost 24. The tapering of the layer 22 near this end means that anyconductive resistive heating occurs near the post portion 24.

The layer 22 is connected to the lower CMOS layers 26 which are formedin the standard manner on a silicon substrate surface 27. The actuatorarm 21 is connected to an ejection paddle which is located within anozzle chamber 28. The nozzle chamber 28 includes an ink ejection nozzle29 from which ink is ejected and includes a convoluted slot arrangement30 which is constructed such that the actuator arm 21 is able to move upand down while causing minimal pressure fluctuations in the area of thenozzle chamber 28 around the slot 30.

FIG. 5 illustrates a sectional view through a single nozzle. FIG. 5illustrates more clearly the internal structure of the nozzle chamberwhich includes the paddle 32 attached to the actuator arm 21 having face33. Importantly, the actuator arm 21 includes, as noted previously, abottom conductive layer 22. Additionally, a top layer 25 is alsoprovided.

The utilization of a second layer 25 of the same material as the firstlayer 22 allows for more accurate control of the actuator position aswill be described with reference to FIGS. 6 and 7. In FIG. 6, there isillustrated the example where a high Young's Modulus material 40 isdeposited utilizing standard semiconductor deposition techniques and ontop of which is further deposited a second layer 41 having a much lowerYoung's Modulus. Unfortunately, the deposition is likely to occur at ahigh temperature. Upon cooling, the two layers are likely to havedifferent coefficients of thermal expansion and different Young'sModuli. Hence, in ambient room temperature, the thermal stresses arelikely to cause bending of the two layers of material as shown at 42.

By utilizing a second deposition of the material having a high Young'sModulus, the situation in FIG. 7 is likely to result wherein thematerial 41 is sandwiched between the two layers 40. Upon cooling, thetwo layers 40 are kept in tension with one another so as to result in amore planar structure 45 regardless of the operating temperature. Thisprinciple is utilized in the deposition of the two layers 22, 25 ofFIGS. 4-5.

Turning again to FIGS. 4 and 5, one important attribute of the preferredembodiments includes the slotted arrangement 30. The slotted arrangementresults in the actuator arm 21 moving up and down thereby causing thepaddle 32 to also move up and down resulting in the ejection of ink. Theslotted arrangement 30 results in minimum ink outflow through theactuator arm connection and also results in minimal pressure increasesin this area. The face 33 of the actuator arm is extended out so as toform an extended interconnect with the paddle surface thereby providingfor better attachment. The face 33 is connected to a block portion 36which is provided to provide a high degree of rigidity. The actuator arm21 and the wall of the nozzle chamber 28 have a generally corrugatednature so as to reduce any flow of ink through the slot 30. The exteriorsurface of the nozzle chamber adjacent the block portion 36 has a rimeg. 38 so to minimize wicking of ink outside of the nozzle chamber. Apit 37 is also provided for this purpose. The pit 37 is formed in thelower CMOS layers 26. An ink supply channel 39 is provided by means ofback etching through the wafer to the back surface of the nozzle.

Turning to FIGS. 8-15 there will now be described fabrication stepsutilized in the construction of a single nozzle in accordance with thepreferred embodiment.

The fabrication uses standard micro-electromechanical techniques. For ageneral introduction to a micro-electromechanical systems (MEMS)reference is made to standard proceedings in this field including theproceeding of the SPIE (International Society for Optical Engineering)including volumes 2642 and 2882 which contain the proceedings of recentadvances and conferences in this field.

1. The preferred embodiment starts with a double sided polished wafercomplete with, say, a 0.2 μm 1 poly 2 metal CMOS process providing forall the electrical interconnects necessary to drive the inkjet nozzle.

2. As shown in FIG. 8, the CMOS wafer 26 is etched at 50 down to thesilicon layer 27. The etching includes etching down to an aluminum CMOSlayer 51, 52.

3. Next, as illustrated in FIG. 9, a 1 μm layer of sacrificial material55 is deposited. The sacrificial material can be aluminum orphotosensitive polyimide.

4. The sacrificial material is etched in the case of aluminum or exposedand developed in the case of polyimide in the area of the nozzle rim 56and including a dished paddle area 57.

5. Next, a 1 μm layer of heater material 60 (cupronickel or TiN) isdeposited.

6. A 3.4 μm layer of PECVD glass 61 is then deposited.

7. A second layer 62 equivalent to the first layer 60 is then deposited.

8. All three layers 60-62 are then etched utilizing the same mask. Theutilization of a single mask substantially reduces the complexity in theprocessing steps involved in creation of the actuator paddle structureand the resulting structure is as illustrated in FIG. 10. Importantly, abreak 63 is provided so as to ensure electrical isolation of the heaterportion from the paddle portion.

9. Next, as illustrated in FIG. 11, a 10 μm layer of sacrificialmaterial 70 is deposited.

10. The deposited layer is etched (or just developed if polyimide)utilizing a fourth mask which includes nozzle rim etchant holes 71,block portion holes 72 and post portion 73.

11. Next a 10 μm layer of PECVD glass is deposited so as to form thenozzle rim 71, arm portions 72 and post portions 73.

12. The glass layer is then planarized utilizing chemical mechanicalplanarization (CMP) with the resulting structure as illustrated in FIG.11.

13. Next, a 3 μm layer of PECVD glass is deposited.

14. The deposited glass is then etched as shown in FIG. 12, to a depthof approximately 1 μm so as to form nozzle rim portion 81 and actuatorinterconnect portion 82.

15. Next, as illustrated in FIG. 13, the glass layer is etched utilizinga 6th mask so as to form final nozzle rim portion 81 and actuator guideportion 82.

16. Next, as illustrated in FIG. 14, the ink supply channel is backetched 85 from the back of the wafer utilizing a 7th mask. The etch canbe performed utilizing a high precision deep silicon trench etcher suchas the STS Advanced Silicon Etcher (ASE). This step can also be utilizedto nearly completely dice the wafer.

17. Next, as illustrated in FIG. 15 the sacrificial material can bestripped or dissolved to also complete dicing of the wafer in accordancewith requirements.

18. Next, the printheads can be individually mounted on attached moldedplastic ink channels to supply ink to the ink supply channels.

19. The electrical control circuitry and power supply can then be bondedto an etch of the printhead with a TAB film.

20. Generally, if necessary, the surface of the printhead is thenhydrophobized so as to ensure minimal wicking of the ink along externalsurfaces. Subsequent testing can determine operational characteristics.

Importantly, as shown in the plan view of FIG. 16, the heater elementhas a tapered portion adjacent the post 73 so as to ensure maximumheating occurs near the post.

Of course, different forms of inkjet printhead structures can be formed.For example, there is illustrated in FIG. 17, a portion of a singlecolor printhead having two spaced apart rows 90, 91, with the two rowsbeing interleaved so as to provide for a complete line of ink to beejected in two stages. Preferably, a guide rail 92 is provided forproper alignment of a TAB film with bond pads 93. A second protectivebarrier 94 can also preferably be provided. Preferably, as will becomemore apparent with reference to the description of FIG. 18 adjacentactuator arms are interleaved and reversed.

Turning now to FIG. 18, there is illustrated a full color printheadarrangement which includes three series of inkjet nozzles 95, 96, 97 oneeach devoted to a separate color. Again, guide rails 98, 99 are providedin addition to bond pads, eg. 100. In FIG. 18, there is illustrated ageneral plan of the layout of a portion of a full color printhead whichclearly illustrates the interleaved nature of the actuator arms.

The presently disclosed ink jet printing technology is potentiallysuited to a wide range of printing system including: color andmonochrome office printers, short run digital printers, high speeddigital printers, offset press supplemental printers, low cost scanningprinters high speed pagewidth printers, notebook computers with inbuiltpagewidth printers, portable color and monochrome printers, color andmonochrome copiers, color and monochrome facsimile machines, combinedprinter, facsimile and copying machines, label printers, large formatplotters, photograph copiers, printers for digital photographic“minilabs”, video printers, PHOTO CD (PHOTO CD is a registered trademarkof the Eastman Kodak Company) printers, portable printers for PDAs,wallpaper printers, indoor sign printers, billboard printers, fabricprinters, camera printers and fault tolerant commercial printer arrays.

One alternative form of detailed manufacturing process which can be usedto fabricate monolithic ink jet printheads operating in accordance withthe principles taught by the present embodiment can proceed utilizingthe following steps:

1. Using a double sided polished wafer 27, complete drive transistors,data distribution, and timing circuits using a 0.5 micron, one poly, 2metal CMOS process to form layer 26. Relevant features of the wafer atthis step are shown in FIG. 20. For clarity, these diagrams may not beto scale, and may not represent a cross section though any single planeof the nozzle. FIG. 19 is a key to representations of various materialsin these manufacturing diagrams, and those of other cross-referenced inkjet configurations.

2. Etch oxide down to silicon or aluminum using Mask 1. This maskdefines the nozzle chamber, the surface anti-wicking notch 37, and theheater contacts 110. This step is shown in FIG. 21.

3. Deposit 1 micron of sacrificial material 55 (e.g. aluminum orphotosensitive polyimide)

4. Etch (if aluminum) or develop (if photosensitive polyimide) thesacrificial layer using Mask 2. This mask defines the nozzle chamberwalls 112 and the actuator anchor point. This step is shown in FIG. 22.

5. Deposit 1 micron of heater material 60 (e.g. cupronickel or TiN). Ifcupronickel, then deposition can consist of three steps—a thinanti-corrosion layer of, for example, TiN, followed by a seed layer,followed by electroplating of the 1 micron of cupronickel.

6. Deposit 3.4 microns of PECVD glass 61.

7. Deposit a layer 62 identical to step 5.

8. Etch both layers of heater material, and glass layer, using Mask 3.This mask defines the actuator, paddle, and nozzle chamber walls. Thisstep is shown in FIG. 23.

9. Wafer probe. All electrical connections are complete at this point,bond pads are accessible, and the chips are not yet separated.

10. Deposit 10 microns of sacrificial material 70.

11. Etch or develop sacrificial material using Mask 4. This mask definesthe nozzle chamber wall 112. This step is shown in FIG. 24.

12. Deposit 3 microns of PECVD glass 113.

13. Etch to a depth of (approx.) 1 micron using Mask 5. This maskdefines the nozzle rim 81. This step is shown in FIG. 25.

14. Etch down to the sacrificial layer using Mask 6. This mask definesthe roof 114 of the nozzle chamber, and the nozzle itself. This step isshown in FIG. 26.

15. Back-etch completely through the silicon wafer (with, for example,an ASE Advanced Silicon Etcher from Surface Technology Systems) usingMask 7. This mask defines the ink inlets 30 which are etched through thewafer. The wafer is also diced by this etch. This step is shown in FIG.27.

16. Etch the sacrificial material. The nozzle chambers are cleared, theactuators freed, and the chips are separated by this etch. This step isshown in FIG. 28.

17. Mount the printheads in their packaging, which may be a moldedplastic former incorporating ink channels which supply the appropriatecolor ink to the ink inlets at the back of the wafer.

18. Connect the printheads to their interconnect systems. For a lowprofile connection with minimum disruption of airflow, TAB may be used.Wire bonding may also be used if the printer is to be operated withsufficient clearance to the paper.

19. Hydrophobize the front surface of the printheads.

20. Fill the completed printheads with ink 115 and test them. A fillednozzle is shown in FIG. 29.

Referring now to FIG. 30 of the drawings, a nozzle assembly, inaccordance with a further embodiment of the invention is designatedgenerally by the reference numeral 110. An ink jet printhead has aplurality of nozzle assemblies 110 arranged in an array 114 (FIGS. 34and 35) on a silicon substrate 116. The array 114 will be described ingreater detail below.

The assembly 110 includes a silicon substrate or wafer 116 on which adielectric layer 118 is deposited. A CMOS passivation layer 120 isdeposited on the dielectric layer 118.

Each nozzle assembly 110 includes a nozzle 122 defining a nozzle opening124, a connecting member in the form of a lever arm 126 and an actuator128. The lever arm 126 connects the actuator 128 to the nozzle 122.

As shown in greater detail in FIGS. 31 to 33 of the drawings, the nozzle122 comprises a crown portion 130 with a skirt portion 132 dependingfrom the crown portion 130. The skirt portion 132 forms part of aperipheral wall of a nozzle chamber 134 (FIGS. 31 to 33 of thedrawings). The nozzle opening 124 is in fluid communication with thenozzle chamber 134. It is to be noted that the nozzle opening 124 issurrounded by a raised rim 136 which “pins” a meniscus 138 (FIG. 31) ofa body of ink 140 in the nozzle chamber 134.

An ink inlet aperture 142 (shown most clearly in FIG. 35 of the drawing)is defined in a floor 146 of the nozzle chamber 134. The aperture 142 isin fluid communication with an ink inlet channel 148 defined through thesubstrate 116.

A wall portion 150 bounds the aperture 142 and extends upwardly from thefloor portion 146. The skirt portion 132, as indicated above, of thenozzle 122 defines a first part of a peripheral wall of the nozzlechamber 134 and the wall portion 150 defines a second part of theperipheral wall of the nozzle chamber 134.

The wall 150 has an inwardly directed lip 152 at its free end whichserves as a fluidic seal which inhibits the escape of ink when thenozzle 122 is displaced, as will be described in greater detail below.It will be appreciated that, due to the viscosity of the ink 140 and thesmall dimensions of the spacing between the lip 152 and the skirtportion 132, the inwardly directed lip 152 and surface tension functionas a seal for inhibiting the escape of ink from the nozzle chamber 134.

The actuator 128 is a thermal bend actuator and is connected to ananchor 154 extending upwardly from the substrate 116 or, moreparticularly, from the CMOS passivation layer 120. The anchor 154 ismounted on conductive pads 156 which form an electrical connection withthe actuator 128.

The actuator 128 comprises an actuator arm in the form of a pair ofactive beams 158 arranged above a pair of passive beams 160. In apreferred embodiment, both beams 158 and 160 are of, or include, aconductive ceramic material such as titanium nitride (TiN).

The beams 158 and 160 have their first ends anchored to the anchor 154and their opposed ends connected to the arm 126. When a current iscaused to flow through the active beams 158 thermal expansion of thebeams 158 results. As the passive beams 160, through which there is nocurrent flow, do not expand at the same rate, a bending moment iscreated causing the arm 126 and, hence, the nozzle 122 to be displaceddownwardly towards the substrate 116 as shown in FIG. 32 of thedrawings. This causes an ejection of ink through the nozzle opening 124as shown at 162 in FIG. 32 of the drawings. Thus, the nozzle 122 and thearm 126 define an ink ejecting mechanism. When the source of heat isremoved from the active beams 158, i.e. by stopping current flow, thenozzle 122 returns to its quiescent position as shown in FIG. 33 of thedrawings. When the nozzle 122 returns to its quiescent position, an inkdroplet 164 is formed as a result of the breaking of an ink droplet neckas illustrated at 166 in FIG. 33 of the drawings. The ink droplet 164then travels on to the print media such as a sheet of paper. As a resultof the formation of the ink droplet 164, a “negative” meniscus is formedas shown at 168 in FIG. 33 of the drawings. This “negative” meniscus 168results in an inflow of ink 140 into the nozzle chamber 134 such that anew meniscus 138 (FIG. 31) is formed in readiness for the next ink dropejection from the nozzle assembly 110.

Each active beam 158 corresponds with one passive beam 160 to form twopairs of beams comprising an active beam 158 and a corresponding passivebeam 160. Each active beam 158 is spaced from its corresponding passivebeam 160 in a plane that is substantially parallel to the substrate. Thespacing between each active beam 158 and its respective passive beam 160is suitably between 1 percent and 20 percent of the length of the beams.Preferably the spacing is between 5 percent and 10 percent of the lengthof the beams. The Applicant has found that this configuration providesthe best protection against mutual buckling while maintaining efficiencyof operation. In particular, Applicant has found that if the spacing isless than 1 percent of the length of the beams there is an unacceptablerisk of mutual buckling and if the spacing is greater than 20 percent ofthe length of the beams the efficiency of the actuators 128 iscompromised.

Referring now to FIGS. 34 and 35 of the drawings, the nozzle array 114is described in greater detail. The array 114 is for a four-colorprinthead. Accordingly, the array 114 includes four groups 170 of nozzleassemblies, one for each color. Each group 170 has its nozzle assemblies110 arranged in two rows 172 and 174. One of the groups 170 is shown ingreater detail in FIG. 35 of the drawings.

To facilitate close packing of the nozzle assemblies 110 in the rows 172and 174, the nozzle assemblies 110 in the row 174 are offset orstaggered with respect to the nozzle assemblies 110 in the row 172.Also, the nozzle assemblies 110 in the row 172 are spaced apartsufficiently far from each other to enable the lever arms 126 of thenozzle assemblies 110 in the row 174 to pass between adjacent nozzles122 of the assemblies 110 in the row 172. It is to be noted that eachnozzle assembly 110 is substantially dumbbell shaped so that the nozzles122 in the row 172 nest between the nozzles 122 and the actuators 128 ofadjacent nozzle assemblies 110 in the row 174.

Further, to facilitate close packing of the nozzles 122 in the rows 172and 174, each nozzle 122 is substantially hexagonally shaped.

It will be appreciated by those skilled in the art that, when thenozzles 122 are displaced towards the substrate 116, in use, due to thenozzle opening 124 being at a slight angle with respect to the nozzlechamber 134 ink is ejected slightly off the perpendicular. It is anadvantage of the arrangement shown in FIGS. 34 and 35 of the drawingsthat the actuators 128 of the nozzle assemblies 110 in the rows 172 and174 extend in the same direction to one side of the rows 172 and 174.Hence, the ink droplets ejected from the nozzles 122 in the row 172 andthe ink droplets ejected from the nozzles 122 in the row 174 areparallel to one another resulting in an improved print quality.

Also, as shown in FIG. 34 of the drawings, the substrate 116 has bondpads 176 arranged thereon which provide the electrical connections, viathe pads 156, to the actuators 128 of the nozzle assemblies 110. Theseelectrical connections are formed via the CMOS layer (not shown).

Referring to FIG. 36 of the drawings, a development of the invention isshown. With reference to the previous drawings, like reference numeralsrefer to like parts, unless otherwise specified.

In this development, a nozzle guard 180 is mounted on the substrate 116of the array 114. The nozzle guard 180 includes a body member 182 havinga plurality of passages 184 defined therethrough. The passages 184 arein register with the nozzle openings 124 of the nozzle assemblies 110 ofthe array 114 such that, when ink is ejected from any one of the nozzleopenings 124, the ink passes through the associated passage 184 beforestriking the print media.

The body member 182 is mounted in spaced relationship relative to thenozzle assemblies 110 by limbs or struts 186. One of the struts 186 hasair inlet openings 188 defined therein.

In use, when the array 114 is in operation, air is charged through theinlet openings 188 to be forced through the passages 184 together withink travelling through the passages 184.

The ink is not entrained in the air as the air is charged through thepassages 184 at a different velocity from that of the ink droplets 164.For example, the ink droplets 164 are ejected from the nozzles 122 at avelocity of approximately 3 m/s. The air is charged through the passages184 at a velocity of approximately 1 m/s.

The purpose of the air is to maintain the passages 184 clear of foreignparticles. A danger exists that these foreign particles, such as dustparticles, could fall onto the nozzle assemblies 110 adversely affectingtheir operation. With the provision of the air inlet openings 88 in thenozzle guard 180 this problem is, to a large extent, obviated.

Referring now to FIGS. 37 to 39 of the drawings, a process formanufacturing the nozzle assemblies 110 is described.

Starting with the silicon substrate or wafer 116, the dielectric layer118 is deposited on a surface of the wafer 116. The dielectric layer 118is in the form of approximately 1.5 microns of CVD oxide. Resist is spunon to the layer 118 and the layer 118 is exposed to mask 200 and issubsequently developed.

After being developed, the layer 118 is plasma etched down to thesilicon layer 116. The resist is then stripped and the layer 118 iscleaned. This step defines the ink inlet aperture 142.

In FIG. 37b of the drawings, approximately 0.8 microns of aluminum 202is deposited on the layer 118. Resist is spun on and the aluminum 202 isexposed to mask 204 and developed. The aluminum 202 is plasma etcheddown to the oxide layer 118, the resist is stripped and the device iscleaned. This step provides the bond pads and interconnects to the inkjet actuator 128. This interconnect is to an NMOS drive transistor and apower plane with connections made in the CMOS layer (not shown).

Approximately 0.5 microns of PECVD nitride is deposited as the CMOSpassivation layer 120. Resist is spun on and the layer 120 is exposed tomask 206 whereafter it is developed. After development, the nitride isplasma etched down to the aluminum layer 202 and the silicon layer 116in the region of the inlet aperture 142. The resist is stripped and thedevice cleaned.

A layer 208 of a sacrificial material is spun on to the layer 120. Thelayer 208 is 6 microns of photo-sensitive polyimide or approximately 4μm of high temperature resist. The layer 208 is softbaked and is thenexposed to mask 210 whereafter it is developed. The layer 208 is thenhardbaked at 400° C. for one hour where the layer 208 is comprised ofpolyimide or at greater than 300° C. where the layer 208 is hightemperature resist. It is to be noted in the drawings that thepattern-dependent distortion of the polyimide layer 208 caused byshrinkage is taken into account in the design of the mask 210.

In the next step, shown in FIG. 37e of the drawings, a secondsacrificial layer 212 is applied. The layer 212 is either 2 μm ofphotosensitive polyimide, which is spun on, or approximately 1.3 μm ofhigh temperature resist. The layer 212 is softbaked and exposed to mask214. After exposure to the mask 214, the layer 212 is developed. In thecase of the layer 212 being polyimide, the layer 212 is hardbaked at400° C. for approximately one hour. Where the layer 212 is resist, it ishardbaked at greater than 300° C. for approximately one hour.

A 0.2 micron multi-layer metal layer 216 is then deposited. Part of thislayer 216 forms the passive beam 160 of the actuator 128.

The layer 216 is formed by sputtering 1,000 Å of titanium nitride (TiN)at around 300° C. followed by sputtering 50 Å of tantalum nitride (TaN).A further 1,000 Å of TiN is sputtered on followed by 50 Å of TaN and afurther 1,000 Å of TiN.

Other materials which can be used instead of TiN are TiB₂, MoSi₂ or (Ti,Al)N.

The layer 216 is then exposed to mask 218, developed and plasma etcheddown to the layer 212 whereafter resist, applied for the layer 216, iswet stripped taking care not to remove the cured layers 208 or 212.

A third sacrificial layer 220 is applied by spinning on 4 μm ofphotosensitive polyimide or approximately 2.6 μm high temperatureresist. The layer 220 is softbaked whereafter it is exposed to mask 222.The exposed layer is then developed followed by hardbaking. In the caseof polyimide, the layer 220 is hardbaked at 400° C. for approximatelyone hour or at greater than 300° C. where the layer 220 comprisesresist.

A second multi-layer metal layer 224 is applied to the layer 220. Theconstituents of the layer 224 are the same as the layer 216 and areapplied in the same manner. It will be appreciated that both layers 216and 224 are electrically conductive layers.

The layer 224 is exposed to mask 226 and is then developed. The layer224 is plasma etched down to the polyimide or resist layer 220whereafter resist applied for the layer 224 is wet stripped taking carenot to remove the cured layers 208, 212 or 220. It will be noted thatthe remaining part of the layer 224 defines the active beam 158 of theactuator 128.

A fourth sacrificial layer 228 is applied by spinning on 4 μm ofphotosensitive polyimide or approximately 2.6 μm of high temperatureresist. The layer 228 is softbaked, exposed to the mask 230 and is thendeveloped to leave the island portions as shown in FIG. 9k of thedrawings. The remaining portions of the layer 228 are hardbaked at 400°C. for approximately one hour in the case of polyimide or at greaterthan 300° C. for resist.

As shown in FIG. 37l of the drawing a high Young's modulus dielectriclayer 232 is deposited. The layer 232 is constituted by approximately 1μm of silicon nitride or aluminum oxide. The layer 232 is deposited at atemperature below the hardbaked temperature of the sacrificial layers208, 212, 220, 228. The primary characteristics required for thisdielectric layer 232 are a high elastic modulus, chemical inertness andgood adhesion to TiN.

A fifth sacrificial layer 234 is applied by spinning on 2 μm ofphotosensitive polyimide or approximately 1.3 μm of high temperatureresist. The layer 234 is softbaked, exposed to mask 236 and developed.The remaining portion of the layer 234 is then hardbaked at 400° C. forone hour in the case of the polyimide or at greater than 300° C. for theresist.

The dielectric layer 232 is plasma etched down to the sacrificial layer228 taking care not to remove any of the sacrificial layer 234.

This step defines the nozzle opening 124, the lever arm 126 and theanchor 154 of the nozzle assembly 110.

A high Young's modulus dielectric layer 238 is deposited. This layer 238is formed by depositing 0.2 μm of silicon nitride or aluminum nitride ata temperature below the hardbaked temperature of the sacrificial layers208, 212, 220 and 228.

Then, as shown in FIG. 37p of the drawings, the layer 238 isanisotropically plasma etched to a depth of 0.35 microns. This etch isintended to clear the dielectric from the entire surface except the sidewalls of the dielectric layer 232 and the sacrificial layer 234. Thisstep creates the nozzle rim 136 around the nozzle opening 124 which“pins” the meniscus of ink, as described above.

An ultraviolet (UV) release tape 240 is applied. 4 μm of resist is spunon to a rear of the silicon wafer 116. The wafer 116 is exposed to mask242 to back etch the wafer 116 to define the ink inlet channel 148. Theresist is then stripped from the wafer 116.

A further UV release tape (not shown) is applied to a rear of the wafer16 and the tape 240 is removed. The sacrificial layers 208, 212, 220,228 and 234 are stripped in oxygen plasma to provide the final nozzleassembly 110 as shown in FIGS. 37r and 38 r of the drawings. For ease ofreference, the reference numerals illustrated in these two drawings arethe same as those in FIG. 30 of the drawings to indicate the relevantparts of the nozzle assembly 110. FIGS. 40 and 41 show the operation ofthe nozzle assembly 110, manufactured in accordance with the processdescribed above with reference to FIGS. 37 and 38, and these figurescorrespond to FIGS. 31 to 34 of the drawings.

It would be appreciated by a person skilled in the art that numerousvariations and/or modifications may be made to the present invention asshown in the specific embodiments without departing from the spirit orscope of the invention as broadly described. The present embodimentsare, therefore, to be considered in all respects to be illustrative andnot restrictive.

I claim:
 1. A micro-electromechanical fluid ejection device thatcomprises a substrate that defines a fluid inlet channel andincorporates a wafer and CMOS layers positioned on the wafer; a nozzlechamber structure that is positioned on the substrate to define a nozzlechamber in fluid communication with the fluid inlet channel and a fluidejection port in fluid communication with the nozzle chamber; anactuator that is connected to the CMOS layers and operatively positionedwith respect to the nozzle chamber, the actuator being displaceable onreceipt of an electrical signal from the CMOS layers to act on fluid inthe nozzle chamber to eject fluid from the fluid ejection port; and anozzle guard that is mounted on the substrate to be spaced from andcover the nozzle chamber structure, the nozzle guard including a bodymember that defines a passage that is aligned with the fluid ejectionport so that fluid ejected from the fluid ejection port passes throughthe passage.
 2. A micro-electromechanical fluid ejection device asclaimed in claim 1, in which the nozzle guard includes support membersthat are fast with the substrate to support the body member above thenozzle chamber structure.
 3. A micro-electromechanical fluid ejectiondevice as claimed in claim 2, in which the support members define airinlet openings to permit air to be pumped into a region between thenozzle chamber structure and the body member and to exit through thepassage.
 4. A micro-electromechanical fluid ejection device as claimedin claim 1, in which the actuator is elongate and is connected at oneend to the CMOS layers, an opposite end of the actuator beingdisplaceable towards and away from the substrate on receipt of anelectrical signal from the CMOS layers, the nozzle chamber structureincluding a nozzle that is connected to said opposite end of theactuator, the nozzle having a crown portion and a skirt portion thatdepends from the crown portion, the crown portion defining the fluidejection port and the skirt portion being positioned so that the nozzleand the wall define the nozzle chamber, a volume of the nozzle chamberbeing reduced and subsequently enlarged as the nozzle is driven towardsand away from the nozzle chamber by the actuator to eject fluid from thefluid ejection port.
 5. A micro-electromechanical fluid ejection deviceas claimed in claim 4, in which an edge of the skirt portion ispositioned adjacent an edge of the wall such that, when the nozzlechamber is filled with liquid, a meniscus is pinned by the edges of theskirt portion and the wall to define a fluidic seal that inhibits theegress of liquid from between the wall and the skirt as liquid isejected from the fluid ejection port.
 6. A micro-electromechanical fluidejection device as claimed in claim 4, in which the crown portionincludes a rim that defines the fluid ejection port, the rim providingan anchor point for a meniscus that is formed in the fluid ejection portwhen the chamber is filled with liquid.
 7. A micro-electromechanicalfluid ejection device which comprises a substrate that defines aplurality of fluid inlet channels and incorporates a wafer and CMOSlayers positioned on the wafer; nozzle chamber structures that arepositioned on the substrate to define nozzle chambers in fluidcommunication with respective fluid inlet channels and fluid ejectionports in fluid communication with respective nozzle chambers; actuatorsthat are connected to the CMOS layers and operatively positioned withrespect to respective nozzle chambers, the actuators being displaceableon receipt of an electrical signal from the CMOS layers to act on fluidin the respective nozzle chambers to eject fluid from the fluid ejectionports; and a nozzle guard that is mounted on the substrate to be spacedfrom and cover the nozzle chamber structures, the nozzle guard includinga body member that defines passages that are aligned with respectivefluid ejection ports so that fluid ejected from the fluid ejection portspasses through the passages.